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Quartz Boats
What Is a Quartz Boat?
A quartz boat is a slotted carrier that holds wafers or substrates vertically during high-temperature furnace processes. In diffusion, oxidation and CVD operations, boats travel through quartz tubes loaded with wafers — so the boat must hold precise slot spacing, survive thousands of thermal cycles, and add no contamination to the process.
Boat Types
- Horizontal boats — for horizontal tube furnaces, wafers held vertically in slots
- Vertical boats / carriers — for vertical furnace platforms
- Custom fixtures — non-wafer carriers, sample racks and special geometries
Specifications
| Parameter | Range |
|---|---|
| Wafer sizes | [Confirm With Production — common sizes on request] |
| Slot pitch | To drawing [Confirm achievable pitch tolerance] |
| Materials | JGS2 / JGS3 (grade comparison) |
| Construction | Slot plates, rods and rails flame-welded; machined details via CNC machining |
Manufacturing
Boats are fabricated from quartz rod and plate: slot plates are machined with controlled slot width and pitch, then assembled by thermal welding. Weld joints are fire-polished to remove stress-raising sharp features. See fabrication capabilities.
Applications
- Semiconductor — batch diffusion, oxidation and CVD carriers
- Solar PV — wafer carriers for diffusion and annealing in cell lines
Customization and Replacement
We manufacture boats to drawing and match existing boat patterns — send a drawing, dimensions, or a worn sample for reverse engineering.
Quality Control
Slot pitch, alignment and overall geometry are inspected before packing; welding points are checked for integrity (quality control).
FAQ
Can you copy an existing boat?
Yes — send the sample or a dimensioned sketch; we reproduce the geometry.
Why did my boat warp?
Typically thermal stress or wall-thickness issues; we can review the failed part and propose a more robust design.
Related Pages
Related products: quartz tubes · quartz crucibles · Related applications: semiconductor · solar
Request a Quote
Request a quote with wafer size, slot pitch and quantity.
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